Specific Process Knowledge/Characterization/SEM Supra 3: Difference between revisions
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This SEM is equipped with a HDAsB (High Definition four quadrant Angular Selective Backscattered electron) detector. This detector is sitting at the end of the column where the final cap is placed in the other SEMs. To avoid collision between the HDAsB detector and samples/sample holders, a set of rules have been introduced on the SEM Supra 3 that most importantly implies that the sample holder and the sample dimensions have to be noted in the software. | This SEM is equipped with a HDAsB (High Definition four quadrant Angular Selective Backscattered electron) detector. This detector is sitting at the end of the column where the final cap is placed in the other SEMs. To avoid collision between the HDAsB detector and samples/sample holders, a set of rules have been introduced on the SEM Supra 3 that most importantly implies that the sample holder and the sample dimensions have to be noted in the software. | ||
The SEM is located in the cleanroom. It was installed in September 2015. | The SEM Supra 3 is located in the cleanroom. It was installed in September 2015. | ||