Specific Process Knowledge/Characterization/SEM Supra 3: Difference between revisions

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 =SEM Supra 3=
-The SEM Supra 1 a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.
+The SEM Supra 3 a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.
-The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the HV detectors will no longer work.
+The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the Se2 and InLens detectors will no longer work.
-The SEM is the training SEM at DTU Danchip. It means that all new SEM users with no and little SEM experience much be trained on this tool and gain basic knowledge (typically 10 hours of usage) here before being qualified for training on other SEM's.
+This SEM is equipped with a HDAsB (High Definition four quadrant Angular Selective Backscattered electron) detector. This detector is sitting at the end of the column where the final cap is placed in the other SEMs. To avoid collision between the HDAsB detector and samples/sample holders, a set of rules have been introduced on the SEM Supra 3 that most importantly implies that the sample holder and the sample dimensions have to be noted in the software.
-The SEM Supra 1 (formerly known as SEM Zeiss) has been relocated to the basement with two purposes: Serving the users that have samples from outside the cleanroom and serving as training tool; all new SEM users with no/little SEM experience must be trained on this tool and gain basic knowledge (typically 10 hours of usage) here before being qualified for training on other SEM's.
+The SEM is located in the cleanroom, next to the SEM Supra 2.
-The SEM is located in basement outside the cleanroom. The Balzer Sputter is located in the same room and can be used to cover samples (for instance polymer samples from  the Polymer Injection Molding tool) with a thin gold layer before SEM inspection.
+The SEM Supra 3 is the newest SEM at Danchip. It was installed in the cleanroom in September 2015.
-The SEM Supra 1 is the newest SEM at Danchip. It was installed in the cleanroom ...
 '''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''
-[http://labmanager.dtu.dk/function.php?module=Machine&view=view&page_id=169 SEM Supra 1 info page in LabManager],
+[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=361 SEM Supra 3 info page in LabManager],