Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide/By Peixiong: Difference between revisions
Appearance
No edit summary |
|||
| Line 647: | Line 647: | ||
<div class=WordSection1> | <div class=WordSection1> | ||
{| class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=748 style='width:561.0pt;border-collapse:collapse' style='height:29.25pt' | {| class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=748 style='width:561.0pt;border-collapse:collapse' style='height:29.25pt' | ||