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Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide/By Peixiong: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,324 edits
Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,324 edits
Line 647: Line 647:


==jsdlfiaj==
==jsdlfiaj==
<div class=WordSection1>
{|  class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=748 style='width:561.0pt;border-collapse:collapse'  style='height:29.25pt'
|  width=136 valign=top style='width:102.0pt;border:solid white 1.0pt;  border-bottom:solid white 3.0pt;background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;  height:29.25pt' |
|  width=136 valign=top style='width:102.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>bad</span></p>
|  width=108 valign=top style='width:81.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>bad</span></p>
|  width=119 valign=top style='width:89.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>bad</span></p>
|  width=121 valign=top style='width:91.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Very good</span></p>
|  width=128 valign=top style='width:96.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' |
|-  style='height:29.25pt'
|  width=136 valign=top style='width:102.0pt;border-top:none;border-left:  solid white 1.0pt;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal>ICP metal etch SiO2 by reist mask try</p>
|  width=136 valign=top style='width:102.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Date</span></p>
|  width=108 valign=top style='width:81.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Feb252013</span></p>
|  width=119 valign=top style='width:89.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Feb252013</span></p>
|  width=121 valign=top style='width:91.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Feb262013</span></p>
|  width=128 valign=top style='width:96.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' |
|-  style='height:29.25pt'
|  width=136 valign=top style='width:102.0pt;border-top:none;border-left:  solid white 1.0pt;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' |
|  width=136 valign=top style='width:102.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Metal ICP  recipe</span></p>
|  width=108 valign=top style='width:81.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>pxSiO2try3</span></p>
|  width=119 valign=top style='width:89.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>pxSiO2try4</span></p>
|  width=121 valign=top style='width:91.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>pxSiO2try5</span></p>
|  width=128 valign=top style='width:96.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:29.25pt' |
|-  style='height:29.25pt'
|  width=136 style='width:102.0pt;border-top:none;border-left:solid white 1.0pt;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=136 style='width:102.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Wafer size and ID</span></p>
|  width=108 style='width:81.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A1_feb252013</span></p>
|  width=119 style='width:89.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A6_feb252013</span></p>
|  width=121 style='width:91.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A1_feb252013</span></p>
|  width=128 style='width:96.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|-  style='height:42.9pt'
|  width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:42.9pt' |
|  width=136 style='width:102.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:42.9pt' | <p class=MsoNormal><span lang=DA>Mask</span></p>
|  width=108 style='width:81.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:42.9pt' | <p class=MsoNormal>980nm resist resist on 62nmBarc on 1190nm apox</p>
|  width=119 style='width:89.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:42.9pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 492nm apox, first etch barc
20sec by Ox plasma</p>
|  width=121 style='width:91.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:42.9pt' | <p class=MsoNormal>440nm resist on 62nmBarc on 1800nm apox, first etch barc
20sec by Ox plasma</p>
|  width=128 style='width:96.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:42.9pt' |
|-  style='height:29.25pt'
|  width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=136 style='width:102.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Etch time</span></p>
|  width=108 style='width:81.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>3min</span></p>
|  width=119 style='width:89.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>3min</span></p>
|  width=121 style='width:91.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>2min</span></p>
|  width=128 style='width:96.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|-  style='height:29.25pt'
|  width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=136 style='width:102.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Pressure [mTorr] </span></p>
|  width=108 style='width:81.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>15</span></p>
|  width=119 style='width:89.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>8</span></p>
|  width=121 style='width:91.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>6</span></p>
|  width=128 style='width:96.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|-  style='height:29.25pt'
|  width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=136 style='width:102.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>C4F8 flow [sccm] </span></p>
|  width=108 style='width:81.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=119 style='width:89.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=121 style='width:91.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>0</span></p>
|  width=128 style='width:96.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|-  style='height:29.25pt'
|  width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=136 style='width:102.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>CF4 flow [sccm] </span></p>
|  width=108 style='width:81.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>40</span></p>
|  width=119 style='width:89.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>40</span></p>
|  width=121 style='width:91.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>40</span></p>
|  width=128 style='width:96.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|-  style='height:29.25pt'
|  width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=136 style='width:102.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>H2 flow [sccm] </span></p>
|  width=108 style='width:81.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p>
|  width=119 style='width:89.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p>
|  width=121 style='width:91.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>30</span></p>
|  width=128 style='width:96.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|-  style='height:29.25pt'
|  width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=136 style='width:102.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Coil Power [W] </span></p>
|  width=108 style='width:81.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p>
|  width=119 style='width:89.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p>
|  width=121 style='width:91.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>800</span></p>
|  width=128 style='width:96.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|-  style='height:29.25pt'
|  width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=136 style='width:102.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Platen Power [W] </span></p>
|  width=108 style='width:81.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>200 </span></p>
|  width=119 style='width:89.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>200 </span></p>
|  width=121 style='width:91.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>100</span></p>
|  width=128 style='width:96.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|-  style='height:29.25pt'
|  width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=136 style='width:102.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Platen temperature [<sup>o</sup>C] </span></p>
|  width=108 style='width:81.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>20 </span></p>
|  width=119 style='width:89.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>20 </span></p>
|  width=121 style='width:91.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>20</span></p>
|  width=128 style='width:96.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|-  style='height:29.25pt'
|  width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=136 style='width:102.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Coil match</span></p>
|  width=108 style='width:81.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>50%, 30%</span></p>
|  width=119 style='width:89.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>59%, 27%</span></p>
|  width=121 style='width:91.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>60%,27%</span></p>
|  width=128 style='width:96.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|-  style='height:29.25pt'
|  width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=136 style='width:102.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Platen Match</span></p>
|  width=108 style='width:81.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>50%, 57%</span></p>
|  width=119 style='width:89.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>44%, 56%</span></p>
|  width=121 style='width:91.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>40%,53%</span></p>
|  width=128 style='width:96.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|-  style='height:29.25pt'
|  width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|  width=136 style='width:102.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>Throde valve opening rate</span></p>
|  width=108 style='width:81.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>10%</span></p>
|  width=119 style='width:89.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>13.6%</span></p>
|  width=121 style='width:91.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' | <p class=MsoNormal><span lang=DA>17%</span></p>
|  width=128 style='width:96.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:29.25pt' |
|-  style='height:52.5pt'
|  width=136 style='width:102.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' |
|  width=136 style='width:102.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' | <p class=MsoNormal><span lang=DA>Comments </span></p>
|  width=108 style='width:81.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' | <p class=MsoNormal>Apox etch 550nm for 3min, side wall angle 71degree</p>
|  width=119 style='width:89.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' | <p class=MsoNormal>Too much polymer, etch Si too much</p><p class=MsoNormal>Etch through 500nm apox, then etch Si 180nm,</p>
|  width=121 style='width:91.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:52.5pt' | <p class=MsoNormal>Profile Very good, 2min etch SiO3 350nm in wafer center,
310nm in wafer, resist etched 260nm</p>
|  width=128 valign=top style='width:96.0pt;border-top:none;border-left:  none;border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;  background:#D0D8E8;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:52.5pt' | <p class=MsoNormal>Low pressure gives better profile, less polymer, however,
CF4 etch Si too quick</p>
|}<p class=MsoNormal>&nbsp;</p></div>
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