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Specific Process Knowledge/Characterization/SEM Supra 3: Difference between revisions

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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment  
!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment  
|style="background:WhiteSmoke; color:black"|<b>SEM Supra 2 (Supra 60VP SEM)</b>
|style="background:WhiteSmoke; color:black"|<b>SEM Supra 3 (Supra 40VP SEM)</b>
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|-
!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Purpose
!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Purpose
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*Secondary electron (Se2)
*Secondary electron (Se2)
*Inlens secondary electron (Inlens)
*Inlens secondary electron (Inlens)
*4 Quadrant Backscatter electron (QBSD)
*High Definition four quadrant Angular Selective Backscattered electron detector (HDAsB)
*Variable pressure secondary electron (VPSE)
*Variable pressure secondary electron (VPSE)
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|-
|style="background:LightGrey; color:black"|Stage
|style="background:LightGrey; color:black"|Stage
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*X, Y: 150 &times; 150 mm
*X, Y: 130 &times; 130 mm
*T: -10 to 70<sup>o</sup>
*T: -4 to 70<sup>o</sup>
*R: 360<sup>o</sup>
*R: 360<sup>o</sup>
*Z: 50 mm
*Z: 50 mm
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|style="background:LightGrey; color:black"|Options
|style="background:LightGrey; color:black"|Options
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Antivibration platform
*High Definition four quadrant Angular Selective Backscattered electron detector (HDAsB)
*Fjeld M-200 airlock taking up to 8" wafers
*Oxford Instruments X-Max<sup>N</sup> 50 mm<sup>2</sup> SDD EDX detector and AZtec software package
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|-
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
|style="background:LightGrey; color:black"|Batch size
|style="background:LightGrey; color:black"|Batch size
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Up to 8" wafer with 6" view
*Up to 6" wafer with full view
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|-
| style="background:LightGrey; color:black"|Allowed materials
| style="background:LightGrey; color:black"|Allowed materials
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