Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide: Difference between revisions
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|Profile [<sup>o</sup>] | |Profile [<sup>o</sup>] | ||
|Not | |Not measured | ||
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|Wafer uniformity map (click on the image to view a larger image) | |Wafer uniformity map (click on the image to view a larger image) | ||