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Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide: Difference between revisions

Bghe (talk | contribs)
Bghe (talk | contribs)
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|Profile [<sup>o</sup>]
|Profile [<sup>o</sup>]
|Not known
|Not measured
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|Wafer uniformity map (click on the image to view a larger image)
|Wafer uniformity map (click on the image to view a larger image)