Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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* T: -10 to 70<sup>o</sup> | * T: -10 to 70<sup>o</sup> | ||
* R: 360<sup>o</sup> | * R: 360<sup>o</sup> | ||
* Z: | * Z: 50 mm | ||
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* X, Y: 130 × 130 mm | * X, Y: 130 × 130 mm | ||
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| style="background:LightGrey; color:black" align="center" |Allowed materials | | style="background:LightGrey; color:black" align="center" |Allowed materials | ||
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* Any standard cleanroom | * Any standard cleanroom materials | ||
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* Any standard cleanroom material | * Any standard cleanroom material and samples from the Laser Micromachining tool and the Polymer Injection Molding tool | ||
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* Any standard cleanroom | * Any standard cleanroom materials | ||
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* Any standard cleanroom | * Any standard cleanroom materials | ||
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* Conductive materials | * Conductive materials | ||