Jump to content

Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions

Pevo (talk | contribs)
Pevo (talk | contribs)
Line 137: Line 137:
* T: -10 to 70<sup>o</sup>  
* T: -10 to 70<sup>o</sup>  
* R: 360<sup>o</sup>  
* R: 360<sup>o</sup>  
* Z: XXX mm
* Z: 50 mm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* X, Y: 130 &times; 130 mm
* X, Y: 130 &times; 130 mm
Line 197: Line 197:
| style="background:LightGrey; color:black" align="center" |Allowed materials
| style="background:LightGrey; color:black" align="center" |Allowed materials
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Any standard cleanroom material except graphene or CNT samples
* Any standard cleanroom materials
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Any standard cleanroom material except graphene or CNT samples
* Any standard cleanroom material and samples from the Laser Micromachining tool and the Polymer Injection Molding tool
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Any standard cleanroom material except graphene or CNT samples
* Any standard cleanroom materials
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Any standard cleanroom material including graphene or CNT samples
* Any standard cleanroom materials
<!--|style="background:WhiteSmoke; color:black"|
<!--|style="background:WhiteSmoke; color:black"|
* Conductive materials
* Conductive materials