Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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<!--|style="background:WhiteSmoke; color:black" align="center"| FEI Quanta 200 3D--> | <!--|style="background:WhiteSmoke; color:black" align="center"| FEI Quanta 200 3D--> | ||
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!style="background:silver; color:black | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Purpose | ||
|style="background:LightGrey; color:black" align="center" | Imaging and measurement of | |style="background:LightGrey; color:black" align="center" | Imaging and measurement of | ||
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* Conductive samples--> | * Conductive samples--> | ||
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|style="background:LightGrey; color:black" align="center" |Other purpose | |||
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* E-beam lithography | |||
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!style="background:silver; color:black;" align="center" width="60"|Instrument Position | !style="background:silver; color:black;" align="center" width="60"|Instrument Position | ||