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Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,317 edits
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|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!Detectors
!Detectors
|CEN A
| A
|CEN B
|B
|CEN C
| C
|CEN D
| D
|CEN E
| E
|-
|-


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|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!Options
!Options
|CEN A
| A
|CEN B
| B
|CEN C
| C
|CEN D
| D
|CEN E
| E
|-
|-


|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!Stage specifications
!Max sample size
|A
|A
|B
|B
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|D
|D
|E
|E
|-
|-
|-style="background:LightGrey; color:black"
!Substrate size
|
*<nowiki>#</nowiki> small samples
*<nowiki>#</nowiki> 50 mm wafers
*<nowiki>#</nowiki> 100 mm wafers
*<nowiki>#</nowiki> 150 mm wafers
|
*<nowiki>#</nowiki> small samples
*<nowiki>#</nowiki> 50 mm wafers
*<nowiki>#</nowiki> 100 mm wafers
*<nowiki>#</nowiki> 150 mm wafers
|-
|-


|-
|-style="background:WhiteSmoke; color:black"
!'''Allowed materials'''
|
*Allowed material 1
*Allowed material 2
|
*Allowed material 1
*Allowed material 2
*Allowed material 3
|-
|}
|}


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