Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions
| Line 48: | Line 48: | ||
0,60 | 0,60 | ||
|- | |- | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|Illumination system's sigma | ||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
0,65 (usual illumination mode) | 0,65 (usual illumination mode) | ||