Specific Process Knowledge/Pattern Design/Travka: Difference between revisions

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Created page with "== The Travka mask set == The travka mask set consists of 7 masks: * Travka 05 with L-Edit design file: file:Travka 05.tdb and cif file file:Travka 05.cif * Travka 10..."
 
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|+ '''Field distribution'''
|+ '''Field distribution'''
|-
|-
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle  
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle  
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy
|-
|-
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Asquare| A-square]]
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| A-square
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Asquare| A-square]]
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| A-square
| style="background:green; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/deskew| Deskew]]
| style="background:green; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/deskew| Deskew]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy
|-
|-
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]]
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]]
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]]
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]]
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]]
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]]
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]]
|-
|-
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle  
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle  
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek
|-
|-
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak
|-
|-
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle  
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle  
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek
|-
|-
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]]
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]]
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]]
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]]
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]]
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]]
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]]
|-
|-
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy
| style="background:green; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/deskew| Deskew]]
| style="background:green; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/deskew| Deskew]]
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Asquare| A-square]]
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| A-square
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Asquare| A-square]]
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| A-square
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy
|-
|-
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle  
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle  
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy
|-
|-
|}
|}

Revision as of 10:18, 4 April 2016

The Travka mask set

The travka mask set consists of 7 masks:

The numbers in the end of the mask names refer to the average exposed area of a positive photolithography process. The masks are designed for characterisation of dry etches and holds a number of 1x1 or 1x2 cm fields. The positions of these fields are the same on all masks.

Each field has a number of features (for instance trenches of variable widths) distributed in such a way that the exposed area within the field corresponds to value for each mask.

Below is shown the field distribution on a 4 inch wafer. Click on the links in the figure to find more information on the individual fields.

Overview of the travka mask set: The position of the fields in relation to the 4" wafer periphery.
Field distribution
Dummy Dummy A-circle PilCav Dektak PilCav A-circle Dummy Dummy
Dummy PilCav A-square Filmtek ASE Filmtek A-square Deskew Dummy
T-ridge A-line Dektak T-ridge A-line
Filmtek PilCav A-circle Filmtek ASE Filmtek A-circle PilCav Filmtek
Dektak ASE Dektak ASE Dektak ASE Dektak ASE Dektak
Filmtek PilCav A-circle Filmtek ASE Filmtek A-circle PilCav Filmtek
A-line T-ridge Dektak A-line T-ridge
Dummy Deskew A-square Filmtek ASE Filmtek A-square PilCav Dummy
Dummy Dummy A-circle PilCav Dektak PilCav A-circle Dummy Dummy