Specific Process Knowledge/Lithography: Difference between revisions
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!Course Responsible | |||
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The Lithography Group at DTU Danchip: sign up for the course by emailing to [mailto:lithography@danchip.dtu.dk lithography@danchip.dtu.dk]. | |||
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The Lithography Group at DTU Danchip: sign up for the course by emailing to lithography@danchip.dtu.dk. | |||
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!Learning Objectives | |||
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* Describe fundamental parts of lithographic processing in a cleanroom, design of process flows | * Describe fundamental parts of lithographic processing in a cleanroom, design of process flows | ||
* Authorization to use spin coater, mask aligner, and developer at DTU Danchip | * Authorization to use spin coater, mask aligner, and developer at DTU Danchip | ||
* Calculate relevant process parameters | * Calculate relevant process parameters | ||
* Analyze and apply your results of lithographic processing | * Analyze and apply your results of lithographic processing | ||
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