Specific Process Knowledge/Lithography: Difference between revisions
| Line 285: | Line 285: | ||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Franssila, 2010, Chapter 9: Optical Lithography] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Franssila, 2010, Chapter 9: Optical Lithography] | ||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography] | ||
*[[Media:Litho_Tool_Package_-_1_Introduction_v2_TIGRE_%28TARAN_ed%29.pdf|TPT slides: Introduction]] | |||
*[http://labadviser.danchip.dtu.dk/images/7/77/Litho_Tool_Package_-_1_Introduction_v2_TIGRE_%28TARAN_ed%29.pdf TPT slides: Introduction] | *[http://labadviser.danchip.dtu.dk/images/7/77/Litho_Tool_Package_-_1_Introduction_v2_TIGRE_%28TARAN_ed%29.pdf TPT slides: Introduction] | ||
*[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] | *[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] | ||
| Line 293: | Line 294: | ||
'''<big>Spin Coating</big>''' | '''<big>Spin Coating</big>''' | ||
*[[Media:Litho_Tool_Package_-_2_Spin_coating_v8_LESJO_%28TARAN_ed%29.pdf|TPT slides: Spin Coating]] | |||
*[http://labadviser.danchip.dtu.dk/images/a/ac/Litho_Tool_Package_-_2_Spin_coating_v8_LESJO_%28TARAN_ed%29.pdf TPT slides: Spin Coating] | *[http://labadviser.danchip.dtu.dk/images/a/ac/Litho_Tool_Package_-_2_Spin_coating_v8_LESJO_%28TARAN_ed%29.pdf TPT slides: Spin Coating] | ||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]''' | *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]''' | ||