Specific Process Knowledge/Lithography: Difference between revisions
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Before the lecture | Before the lecture | ||
* Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus, see link below) | * Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus, see link below) | ||
* Optional: See training videos (training videos can be found below). | * Optional but recommended: See training videos (training videos can be found below). | ||
Before training session | Before training session | ||
* See training videos of spin coating (automatic and manual), exposure (operation and alignment), and development (automatic and manual). The training videos can be found below. | * See training videos of spin coating (automatic and manual), exposure (operation and alignment), and development (automatic and manual). The training videos can be found below. | ||