Specific Process Knowledge/Thin film deposition/Deposition of Titanium: Difference between revisions
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== Comments: Choise of equipment == | == Comments: Choise of equipment == | ||
'''Thick layers''' | |||
Practical experience has shown that at some occation it is better to use the Wordentec than the Alcatel for thicker Ti layers. Deposition of 5000 Å Ti on Si is working fine in both machines. However, with the same thickness of Ti deposited on pyrex+resist, the metal layer deposited in Alcatel may have metal flakes in the center of the wafer. The process workes without problems in Wordentec. | |||
== Comments: Adhesion layer == | == Comments: Adhesion layer == | ||