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=Knowledge and Information about Lithography=
=Knowledge and Information about Lithography=
<span style="background:#FF2800">THIS SECTION IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]
<span style="background:#FF2800">THIS SECTION IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]
''' Lithography Tool Package Training'''
DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipments, as well as training in equipment operation and processing in the cleanroom. The course is recommended for all users that intend to perform any lithographic processing in the cleanroom.
'''Schedule:''' The tool package consists of a ~3.5 hour lecture and a one-day training session in the cleanroom.
'''Location:''' Meeting room bulding 347 at DTU Danchip and in cleanroom facilities at DTU Danchip
'''Qualified Prerequisites:'''
* Cleanroom safety course at DTU Danchip
* Wet Chemistry Course at DTU Danchip,
* Training videos of spin coating (automatic and manual), exposure, and development (automatic and manual). The training videos can be found below.
''' Course Responsible:''' The Lithography Group at DTU Danchip: sign up for the course by emailing to lithography@danchip.dtu.dk.
''' Learning Objectives'''
* Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
* Authorization to use spin coater, mask aligner, and developer at DTU Danchip
* Calculate relevant process parameters
* Analyze and apply your results of lithographic processing
'''Literature'''
See list of literature below. Also, find training videos and slides from the lecture below.


{| style="color: black;" width="90%"
{| style="color: black;" width="90%"
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==Litho Tool Package Training==
==Litho Tool Package Training==
DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipments, as well as training in equipment operation and processing in the cleanroom. The course is recommended for all users that intend to perform any lithographic processing in the cleanroom.
'''Schedule:''' The tool package consists of a ~3.5 hour lecture and a one-day training session in the cleanroom.
'''Location:''' Meeting room bulding 347 at DTU Danchip and in cleanroom facilities at DTU Danchip
'''Qualified Prerequisites:'''
* Cleanroom safety course at DTU Danchip
* Wet Chemistry Course at DTU Danchip,
* Training videos of spin coating (automatic and manual), exposure, and development (automatic and manual). The training videos can be found above.
''' Course Responsible:''' The Lithography Group at DTU Danchip: sign up for the course by emailing to lithography@danchip.dtu.dk.
''' Learning Objectives'''
* Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
* Authorization to use spin coater, mask aligner, and developer at DTU Danchip
* Calculate relevant process parameters
* Analyze and apply your results of lithographic processing
'''Literature'''
See list of literature below. Also, find training videos and slides from the lecture above.


*[[Specific Process Knowledge/Lithography/Tool_Package_Training|Lithography Tool Package Training]]
*[[Specific Process Knowledge/Lithography/Tool_Package_Training|Lithography Tool Package Training]]
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography"