Specific Process Knowledge/Lithography: Difference between revisions
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''' Lithography Tool Package Training''' | ''' Lithography Tool Package Training''' | ||
Schedule: | |||
Schedule: The tool package consists of a ~3.5 hour lecture and a one-day training session in the cleanroom. | |||
Location: Meeting room bulding 347 at DTU Danchip and in cleanroom facilities at DTU Danchip | Location: Meeting room bulding 347 at DTU Danchip and in cleanroom facilities at DTU Danchip | ||
Qualified Prerequisites: | Qualified Prerequisites: | ||
* Cleanroom safety course at DTU Danchip | * Cleanroom safety course at DTU Danchip | ||
* Wet Chemistry Course at DTU Danchip, | * Wet Chemistry Course at DTU Danchip, | ||
* Training videos of spin coating (Automatic and manual), exposure, and development (automatic and manual). The training videos can be found below. | * Training videos of spin coating (Automatic and manual), exposure, and development (automatic and manual). The training videos can be found below. | ||
Responsible: The Lithography Group at DTU Danchip | |||
Responsible: The Lithography Group at DTU Danchip: sign up for the course by emailing to lithography@danchip.dtu.dk. | |||
''' Learning Objectives''' | ''' Learning Objectives''' | ||
* Describe fundamental parts of lithographic processing in a cleanroom | * Describe fundamental parts of lithographic processing in a cleanroom, design of process flows | ||
* | * Authorization to use spin coater, mask aligner, and developer at DTU Danchip | ||
* Calculate relevant process parameters | |||
* Analyze and apply your results of lithographic processing | |||