Specific Process Knowledge/Lithography: Difference between revisions
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=Knowledge and Information about Lithography= | =Knowledge and Information about Lithography= | ||
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DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic process and equipment, as well as training in equipment operation and processing in the cleanroom. The course is recommended for all users that intend to perform any lithographic processing in the cleanroom. | |||
The Lithography Tool Package consists of two parts - a ~3 hour lecture and a one-day training inside the cleanroom: | |||
''' Lithography Tool Package Training''' | |||
Schedule: sign up for the course by emailing to lithography@danchip.dtu.dk. | |||
Location: Meeting room bulding 347 at DTU Danchip and in cleanroom facilities at DTU Danchip | |||
Scope and form: Lecture and training on equipments in cleanroom | |||
Qualified Prerequisites: | |||
* Cleanroom safety course at DTU Danchip | |||
* Wet Chemistry Course at DTU Danchip, | |||
* Training videos of spin coating (Automatic and manual), exposure, and development (automatic and manual). The training videos can be found below. | |||
Responsible: The Lithography Group at DTU Danchip | |||
''' Learning Objectives''' | |||
* Describe fundamental parts of lithographic processing in a cleanroom | |||
*Spin coating of resists, exposure of resist using a mask aligner, development of resist using an automatic puddle developer | |||
'''Literature''' | |||
See list of literature below. Also, find training videos and slides from the lectures below. | |||
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