Specific Process Knowledge/Etch: Difference between revisions
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*[[/Etching of Silicon Nitride|Silicon Nitride]] | *[[/Etching of Silicon Nitride|Silicon Nitride]] | ||
*[[/Etching of Silicon Oxide|Silicon Oxide]] | *[[/Etching of Silicon Oxide|Silicon Oxide]] | ||
*[[/Etching of Bulk Glass|Bulk Glass]] - ''Borofloat (pyrex) and fused silica (quartz) | *[[/Etching of Bulk Glass|Bulk Glass]] - ''Borofloat (pyrex) and fused silica (quartz)'' | ||
== Choose a dry etch equipment == | == Choose a dry etch equipment == | ||