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Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions

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! Sputter coater [[Specific Process Knowledge/Thin film deposition/Sputter coater#The_Hummer_Sputter_coater|Hummer]]   
! Sputter coater [[Specific Process Knowledge/Thin film deposition/Sputter coater#The_Hummer_Sputter_coater|Hummer]]   
! Sputter coater [[Specific Process Knowledge/Thin film deposition/Sputter coater#The_Balzer_Sputter_coater|Balzer]]
! Sputter coater [[Specific Process Knowledge/Thin film deposition/Sputter coater#The_Balzer_Sputter_coater|Balzer]]
! Sputter coater [[Specific Process Knowledge/Thin film deposition/Sputter coater#The_Balzer_Sputter_coater|Sputter coater 03]]
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
! General description
! General description
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| Sputter deposition of Au
| Sputter deposition of Au
| E-beam deposition of Au
| E-beam deposition of Au
| Sputter deposition of Au
| Sputter deposition of Au
| Sputter deposition of Au
| Sputter deposition of Au
| Sputter deposition of Au
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|
|
|
|
 
|
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
! Layer thickness
! Layer thickness
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|
|
|
|
 
|Not measured
|-
|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
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|Not measured
|Not measured
|Not measured
|Not measured
 
|Not measured
|-
|-


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*1 large sample (< 4" wafer)
*1 large sample (< 4" wafer)
*Several smaller samples
*Several smaller samples
 
|
*1x4" wafer
*Several smaller samples
|-
|-


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* Quartz wafers  
* Quartz wafers  
* Pyrex wafers
* Pyrex wafers
|
|
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* All samples allowed in the SEM Supra 1
|.
|.
|.
|.
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|Used to gold sputter coating of   
|Used for gold sputter coating of   
samples mainly before SEM characterization
samples before SEM inspection
|Used to gold sputter coating of  
|Used for gold sputter coating of  
samples mainly before SEM characterization
samples before SEM inspection
 
|Used for gold sputter coating of
samples before SEM inspection
|-
|-
|}
|}
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