LabAdviser/Technology Research/Microfabrication of Hard x-ray Lenses: Difference between revisions
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===Three-dimensional nanometrology of microstructures by replica molding and large-range atomic force microscopy=== | ===Three-dimensional nanometrology of microstructures by replica molding and large-range atomic force microscopy=== | ||
Stöhr F, Michael-Lindhard J, Simons H, Poulsen H F, Hübner J, Hansen O, Garnaes J and Jensen F. 2015 Three-dimensional nanometrology of microstructures by replica molding and large-range atomic force microscopy. Microelectronic Engineering 141, 6–11 [http://dx.doi.org/10.1016/j. | Stöhr F, Michael-Lindhard J, Simons H, Poulsen H F, Hübner J, Hansen O, Garnaes J and Jensen F. 2015 Three-dimensional nanometrology of microstructures by replica molding and large-range atomic force microscopy. Microelectronic Engineering 141, 6–11 [http://dx.doi.org/10.1016/j.me2014.11.026 LINK] | ||
===Optimizing shape uniformity and increasing structure heights of deep reactive ion etched silicon X-ray lenses=== | ===Optimizing shape uniformity and increasing structure heights of deep reactive ion etched silicon X-ray lenses=== | ||