LabAdviser/Technology Research/Microfabrication of Hard x-ray Lenses: Difference between revisions
Created page with "=Microfabrication of Hard x-ray Lenses= *Project type: Ph.d project *Project responsible: Frederik Stöhr *Sites involved: DTU Physics, DTU Danchip, DTU Nanotech ==Project de..." |
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In each case, observed non-uniformities of the shaped x-ray beams were investigated and found to be in agreement with the lens shape measurements. In iterative steps the lenses have been improved and the most recent results allow yet another whole range of improvements to be made. The fundamentals for an advanced fabrication of silicon CRLs are laid out, which will contribute to their future use in novel applications. | In each case, observed non-uniformities of the shaped x-ray beams were investigated and found to be in agreement with the lens shape measurements. In iterative steps the lenses have been improved and the most recent results allow yet another whole range of improvements to be made. The fundamentals for an advanced fabrication of silicon CRLs are laid out, which will contribute to their future use in novel applications. | ||
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==Publications== | |||
===Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon X-ray lenses=== | |||
Stöhr F, Michael-Lindhard J, Hübner J, Jensen F, Simons H, Jakobsen A C, Poulsen H F and Hansen O. 2015 Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon X-ray lenses. Journal of Vacuum Science and Technology B 33(6), 062001 LINK | |||
===Three-dimensional nanometrology of microstructures by replica molding and large-range atomic force microscopy=== | |||
Stöhr F, Michael-Lindhard J, Simons H, Poulsen H F, Hübner J, Hansen O, Garnaes J and Jensen F. 2015 Three-dimensional nanometrology of microstructures by replica molding and large-range atomic force microscopy. Microelectronic Engineering 141, 6–11 LINK | |||
===Optimizing shape uniformity and increasing structure heights of deep reactive ion etched silicon X-ray lenses=== | |||
Stöhr F, Wright J, Simons H, Michael-Lindhard J, Hübner J, Jensen F, Hansen O and Poulsen H F. 2015 Optimizing shape uniformity and increasing structure heights of deep reactive ion etched silicon X-ray lenses. Journal of Micromechanics and Microengineering 25(12), 125013 LINK | |||
===Injection molded polymeric hard X-ray lenses=== | |||
Stöhr F, Simons H, Jakobsen A C, Nielsen C H, Michael-Lindhard J, Jensen F, Poulsen H F, Hansen O and Hübner J. 2015 Injection molded polymeric hard X-ray lenses. Optical Materials Express 5(12), 2804-2811 LINK | |||
===Full-field hard x-ray microscopy with interdigitated silicon lenses=== | |||
Simons H, Stöhr F, Michael-Lindhard J, Jensen F, Hansen O, Detlefs C and Poulsen H F. 2015 Full-field hard x-ray microscopy with interdigitated silicon lenses. Optics Communications 359, 460-464 LINK | |||
===Dark-field X-ray microscopy for multiscale structural characterization=== | |||
Simons H, King A, Ludwig W, Detlefs C, Pantleon W, Schmidt S, Stöhr F, Snigireva I, Snigirev A and Poulsen H F. 2015 Dark-field X-ray microscopy for multiscale structural characterization. Nature Communications 6, 6098 LINK | |||