Specific Process Knowledge/Lithography: Difference between revisions
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*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=339 Training Video: UV Mask Aligner]''' | *[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=339 Training Video: UV Mask Aligner]''' | ||
*[[Specific_Process_Knowledge/Lithography/UVExposure_Dose|Information on UV Exposure Dose]] | *[[Specific_Process_Knowledge/Lithography/UVExposure_Dose|Information on UV Exposure Dose]] | ||
*[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/UVExposure_Dose Information on UV Exposure Dose] | |||
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*[[Specific_Process_Knowledge/Lithography/EBeamLithography#E-beam_resists_and_Process_Flows|E-beam resists and process flows]] | *[[Specific_Process_Knowledge/Lithography/EBeamLithography#E-beam_resists_and_Process_Flows|E-beam resists and process flows]] | ||
*[[:Media:E-beam Lithography Lecture Tine Greibe 2015.pdf|Lecture on E-beam Lithography]] | *[[:Media:E-beam Lithography Lecture Tine Greibe 2015.pdf|Lecture on E-beam Lithography]] | ||