Specific Process Knowledge/Lithography: Difference between revisions
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'''<big>Spin Coating</big>''' | '''<big>Spin Coating</big>''' | ||
*[[:Media:Litho Tool Package - 2 Spin coating v8 LESJO (TARAN ed).pdf|Slides on | *[[:Media:Litho Tool Package - 2 Spin coating v8 LESJO (TARAN ed).pdf|Slides on spin coating]] | ||
*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=359 Training Video: Automatic Spin Coater]''' | *[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=359 Training Video: Automatic Spin Coater]''' | ||
*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=362 Training Video: Manual Spin Coater]''' | *[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=362 Training Video: Manual Spin Coater]''' | ||
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'''<big>Inspection of Resist</big>''' | '''<big>Inspection of Resist</big>''' | ||
*[[:Media:Litho Tool Package - Inspection v4 TARAN.pdf|Slides on inspection]] | *[[:Media:Litho Tool Package - Inspection v4 TARAN.pdf|Slides on inspection]] | ||
*[[:Media:Litho Tool Package - 8 Process effects and examples v4 TARAN.pdf|Slides on | *[[:Media:Litho Tool Package - 8 Process effects and examples v4 TARAN.pdf|Slides on process effects and examples]] | ||
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