Specific Process Knowledge/Lithography: Difference between revisions
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'''<big>Electron Beam Exposure</big>''' | '''<big>Electron Beam Exposure</big>''' | ||
*[[ | *[[Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL_JBX-9500FSZ#Getting_started|Training on JEOL JBX-9500FSZ]] | ||
*[[:Media:E-beam Lithography Lecture Tine Greibe.pdf|Slides on E-beam Lithography]] | |||
* Literature on E-beam Writers and Lithography | * Literature on E-beam Writers and Lithography | ||
** [http://www.cnf.cornell.edu/cnf_spietoc.html Handbook of Microlithography, Micromachining, and Microfabrication] | ** [http://www.cnf.cornell.edu/cnf_spietoc.html Handbook of Microlithography, Micromachining, and Microfabrication] | ||