Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch click here]''' | '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch click here]''' | ||
<!--Checked for updates on 2/2-2016 - ok/jmli --> | <!--Checked for updates on 2/2-2016 - ok/jmli --> | ||
== Development of continuous nanoetch == | == Development of continuous nanoetch == | ||
The recipes below have been run on | |||
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