Specific Process Knowledge/Lithography: Difference between revisions
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'''<big>UV Exposure</big>''' | '''<big>UV Exposure</big>''' | ||
*[[:Media:Litho Tool Package - Exposure TARAN.pdf|Slides on UV exposure]] | *[[:Media:Litho Tool Package - Exposure TARAN.pdf|Slides on UV exposure]] | ||
*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=339 Training Video: UV | *[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=339 Training Video: UV Mask Aligner]''' | ||
*[[Specific_Process_Knowledge/Lithography/UVExposure_Dose|Information on UV Exposure Dose]] | *[[Specific_Process_Knowledge/Lithography/UVExposure_Dose|Information on UV Exposure Dose]] | ||