Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:600px" | {| border="1" cellspacing="1" cellpadding="2" align="center" style="width:600px" | ||
! Values from SAT (Nov. 2012) | ! Values from SAT (Nov. 2012) | ||
! Actual value (Dec. 2014) | ! Actual value (Dec. 2014) | ||
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* 532nm, F255mm : 4,82W | * 532nm, F255mm : 4,82W | ||
* 1064nm, F255mm : 42,40W | * 1064nm, F255mm : 42,40W | ||
| Repetition rate : 200kHz | | Repetition rate : 200kHz | ||