Specific Process Knowledge/Etch/DryEtchProcessing/Bonding: Difference between revisions
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====Making Carrier with capton(polyimide) tape==== | ====Making Carrier with capton(polyimide) tape==== | ||
If you do not want to bond your sample to the carrier you can make a carrier wafer by adding pieces of capton tape on the carrier wafer to avoid the sample to slide off the carrier inside the chamber. You have to follow this procedure to keep the carrier clean. | |||
[[:file:Making carrier with capton tape.docx]] | [[:file:Making carrier with capton tape.docx]] | ||