Specific Process Knowledge/Pattern Design: Difference between revisions
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== Mask Fabrication for UV-lithography == | == Mask Fabrication for UV-lithography == | ||
=== Tips and tricks for mask designing === | |||
You can find a | |||
* [[Media:Beginner_guide_to_mask_design_using_Clewin_v1.1.pdf|"Beginners guide to mask design" here]] and | |||
* [[Media:Guide to mask making.pdf | Guide to mask making.pdf]]. Unfortunately this is quite old, but may be useful anyway. Note some links/e-mails etc. are not correct anymore | |||
===Alignment marks=== | ===Alignment marks=== | ||