Specific Process Knowledge/Pattern Design: Difference between revisions
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== Mask Fabrication for UV-lithography == | |||
===Alignment marks=== | ===Alignment marks=== | ||
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**Please notice that if you plan to use the automatic alignment option the alignment marks must be displaced from y=0 to y=+/- 1,6mm. | **Please notice that if you plan to use the automatic alignment option the alignment marks must be displaced from y=0 to y=+/- 1,6mm. | ||
=== How to order a mask=== | === How to order a mask=== | ||