Specific Process Knowledge/Pattern Design: Difference between revisions
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=== Layout file format=== | === Layout file format=== | ||
* For '''E-beam lithography''' the layout file has to be saved as a GDS file that | * For '''E-beam lithography''' the layout file has to be saved as a GDS file that can be uploaded to the equipment computer. | ||
* For '''laser cutting''' the layout file has to be saved as a DXF file that is uploaded to the equipment computer. For more details see [[Specific_Process_Knowledge/Back-end_processing/Mask_making|Mask Making on the Laser Micro Machining Tool]]. | * For '''laser cutting''' the layout file has to be saved as a DXF file that is uploaded to the equipment computer. For more details see [[Specific_Process_Knowledge/Back-end_processing/Mask_making|Mask Making on the Laser Micro Machining Tool]]. | ||