Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions

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 [[image:SEM-Leo.jpg|200x200px|right|thumb|The Leo SEM]]
-[[image:SEM-Jeol.jpg|200x200px|right|thumb|The Jeol SEM is located outside the cleanroom in the basement ]]
 == Scanning electron microscopy at Danchip==
-The SEM's at Danchip cover a wide range of needs both in the cleanroom and outside: From the fast in-process verification of different process parameters such as etch rates, step coverages or lift-off quality to the ultra high resolution images on any type of sample intended for publication.
+The SEM's at Danchip cover a wide range of needs both in the cleanroom and outside: From the fast in-process verification of different process parameters such as etch rates, step coverages or lift-off quality to the ultra high resolution images on any type of sample intended for publication. They are all manufactured by Carl Zeiss and have the same graphical user interface.
 At the turn of the year 2015-2016 we made a reorganisation of the SEM's at Danchip. The old workhorse SEM's (the Leo and Zeiss) that have excellently served the users of the cleanroom for many years will be given new roles.
-The Leo SEM is a very reliable and rugged instrument that provides high quality images of most samples. It will be exclusively dedicated to the users of the Raith E-beam lithography system so general imaging of user samples is no longer allowed. The SEM Supra 1 (formerly)
+* The Leo SEM is a very reliable and rugged instrument that provides high quality images of most samples. It is exclusively dedicated to the users of the Raith E-beam lithography system so general imaging of user samples is no longer allowed.
+* The SEM Supra 1 (formerly known as SEM Zeiss) has been relocated to the basement with two purposes: Serving the users that have samples from outside the cleanroom and serving as training tool; all new SEM users with no/little SEM experience must be trained on this tool and gain basic knowledge (typically 10 hours of usage) here before being qualified for training on other SEM's.
+The two remaining SEM's at Danchip (called SEM Supra 2 and SEM Supra 3) serve as general imaging tools in the cleanroom. Like Supra 1, they are VP models from Carl Zeiss and will produce excellent images on any sample. The possibility of operating at higher chamber pressures in the VP mode makes imaging of bulk non-conducting samples possible. The SEM Supra 2 is also equipped with an airlock and an EDX detector.
-The old 'workhorse' SEM t will cover most users needs is the [[/Leo|Leo SEM]]. It is a very reliable and rugged instrument that provides high quality images of most samples. Excellent images on a large variety of materials such as semiconductors, semiconductor oxides or nitrides, metals, thin films and some polymers may be acquired on the [[/Leo|Leo SEM]]. As such, we prefer that new users that have no prior SEM experience get trained on the Leo SEM before they start using the other SEM's.
-The [[/Zeiss|Zeiss SEM]] and the [[/Supra60VP|Supra 60 VP SEM]] are both 'Supra VP' models from Carl Zeiss (a 40 and 60 respectively). As such they share a lot of similaritites but they also differ in some respects. The SmartSEM operator software installed on both these SEM's is also running on the Leo. This is very convenient as it allows the users to shift between instruments quite easily.
-The [[/Zeiss|Zeiss SEM]] was installed in the cleanroom in 2010 and quickly became the 'Weapon of choice' for many SEM users. It's a state-of-the-art SEM that will produce excellent images on any sample. The possibility of operating at higher chamber pressures in the VP mode makes imaging of bulk non-conducting samples possible.
-The [[/Supra60VP|Supra 60 VP SEM]] is basically the same as the Zeiss SEM but with some additional features such as an airlock and an EDX detector.
-Outside the cleanroom in the basement of building 346, the [[/Jeol|Jeol SEM]] provides a possibilty of imaging samples that do not go into the cleanroom.
 '''The user manuals, quality control procedures and results, user APVs, technical information and contact information can be found in LabManager:'''<br>