Specific Process Knowledge/Thin film deposition/PECVD/Doping: Difference between revisions
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=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]= | =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]= | ||
=== | ===Recipe=== | ||
{| border="1" cellspacing="0" cellpadding="7" | {| border="1" cellspacing="0" cellpadding="7" | ||
|- | |- | ||
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|N2 flow [sccm] | |N2 flow [sccm] | ||
|B2H6 flow [sccm] | |B2H6 flow [sccm] | ||
|Pressure [mTorr] | |Pressure [mTorr] | ||
|Power [W] | |Power [W] | ||
|Description | |Description | ||
|- | |- | ||
|1PBSG | |1PBSG | ||
|17 | |17 | ||
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|0 | |0 | ||
|135 | |135 | ||
|500 | |500 | ||
|800LF | |800LF | ||
|BPSG glass for | |BPSG glass for drive in boron in Silcion | ||
|} | |} | ||
Revision as of 09:43, 1 December 2015
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Recipe
| Recipe name | SiH4 flow [sccm] | N2O flow [sccm] | N2 flow [sccm] | B2H6 flow [sccm] | Pressure [mTorr] | Power [W] | Description |
| 1PBSG | 17 | 1600 | 0 | 135 | 500 | 800LF | BPSG glass for drive in boron in Silcion |