Specific Process Knowledge/Wafer cleaning/RCA: Difference between revisions
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|'''Life time of the chemical solutions''' | |'''Life time of the chemical solutions''' | ||
| | |Can only be heated one time. When hot: it lasts for ~1½h | ||
| | |Can only be heated one time. When hot: it lasts for ~1½h | ||
|~2 months | |~2 months | ||
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