Specific Process Knowledge/Wafer cleaning/RCA: Difference between revisions
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! | ! RCA1 | ||
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|'''General description''' | |'''General description''' | ||
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Cleaning of wafers using a beaker in the fumehood in cleanroom 2. Used for glass wafers or wafers with metal or other materials that you are not allowed to put in the 7-up for wafers. | Cleaning of wafers using a beaker in the fumehood in cleanroom 2. Used for glass wafers or wafers with metal or other materials that you are not allowed to put in the 7-up for wafers. | ||
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|'''Chemical solution''' | |'''Chemical solution''' | ||