Specific Process Knowledge/Back-end processing/Disco Saw: Difference between revisions
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0.1 - 300 mm/sec | 0.1 - 300 mm/sec | ||
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|style="background:silver; color:black"|.||style="background:LightGrey; color:black"| | |style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Y-axis cutting range | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
162 µm | |||
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|style="background:silver; color:black"|.||style="background:LightGrey; color:black"| | |style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Y-axis index step | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
0.0002 mm | |||
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|style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W | |style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W | ||