Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
| Line 11: | Line 11: | ||
'''The Bosch process''' | '''The Bosch process''' | ||
The DRIE Pegasus is a state-of-art silicon dry etcher that offers outstanding performance in terms of etch rate, uniformity etc. It uses the so-called Bosch process to achieve excellent control of the etched features. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description| | The DRIE Pegasus is a state-of-art silicon dry etcher that offers outstanding performance in terms of etch rate, uniformity etc. It uses the so-called Bosch process to achieve excellent control of the etched features. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|HERE]] for more fundamental information of the system. | ||
=== Change of showerhead in December 2014 === | === Change of showerhead in December 2014 === | ||