Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
| Line 49: | Line 49: | ||
*Silicon wafers (new from the box or RCA cleaned) | *Silicon wafers (new from the box or RCA cleaned) | ||
*From A2 furnace directly (e.g. incl. Predep HF) | *From A2 furnace directly (e.g. incl. Predep HF) | ||
*In doubt: look at the cross contamination sheet or ask one from the furnace team | |||
|- | |- | ||
|} | |} | ||