Specific Process Knowledge/Characterization/Lifetime scanner MDPmap: Difference between revisions
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[[image:IMG_3290.jpg|400x400px|right|thumb|Lifetime scanner MPDmap, positioned in cleanroom D-3.]] | [[image:IMG_3290.jpg|400x400px|right|thumb|Lifetime scanner MPDmap, positioned in cleanroom D-3.]] | ||
== Microwave Detected Photoconductivity (MDP) == | |||
Topographic visualisation of electrically active defects or materiel properties at almost any production stage, allows for process optimization and performance prediction of devices. | |||
MDP is a contact less, non destructive measurement technology for the electrical characterization | |||
of a large variety of semiconductors. The mapping and visualization of so far not detectable | |||
defects was achieved by improving the sensitivity of a microwave detection system | |||
by several orders of magnitude. Electrical properties such as lifetime, τ, mobility, μ, and diffusion | |||
length, L, can be measured also at very low injection levels with a spatial resolution limited | |||
only by the diffusion length of the charge carriers. | |||
'''The user manual, control instruction, the user APV and contact information can be found in LabManager:''' | '''The user manual, control instruction, the user APV and contact information can be found in LabManager:''' | ||