Specific Process Knowledge/Characterization/Lifetime scanner MDPmap: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Lifetime_scanner_MDPmap click here]''' | '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Lifetime_scanner_MDPmap click here]''' | ||
[[image:IMG_3290.jpg|400x400px|right|thumb|Lifetime scanner MPDmap, positioned in cleanroom D-3.]] | |||
'''The user manual, control instruction, the user APV and contact information can be found in LabManager:''' | |||
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=169 Lifetime scanner MPDmap info page in LabManager], | |||
== Performance information == | |||
==Equipment performance and process related parameters== | |||
{| border="2" cellspacing="0" cellpadding="2" | |||
!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | |||
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!style="background:silver; color:black;" align="center" width="60"|Purpose | |||
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!style="background:silver; color:black;" align="center" width="60"|Location | |||
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!style="background:silver; color:black;" align="center" width="60"|Performance | |||
|style="background:LightGrey; color:black"|Resolution | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Instrument specifics | |||
|style="background:LightGrey; color:black"|Detector | |||
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|style="background:LightGrey; color:black"|Stage | |||
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|style="background:LightGrey; color:black"|Electron source | |||
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|style="background:LightGrey; color:black"|Operating pressures | |||
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|style="background:LightGrey; color:black"|Options | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | |||
|style="background:LightGrey; color:black"|Batch size | |||
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*1 100 mm wafer | |||
*1 150 mm wafer | |||
*1 200 mm wafer (not full view) | |||
*Smaller samples | |||
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| style="background:LightGrey; color:black"|Allowed materials | |||
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*Any standard cleanroom materials. | |||
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|} | |||
