Specific Process Knowledge/Characterization/SEM LEO: Difference between revisions
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|style="background:LightGrey; color:black"|Resolution | |style="background:LightGrey; color:black"|Resolution | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*~ 5 | *~ 5 nm (limited by vibrations) | ||
The resolution is strongly dependent on the type of sample and the skills of the operator. | The resolution is strongly dependent on the type of sample and the skills of the operator. | ||
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