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Specific Process Knowledge/Characterization/SEM LEO: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,331 edits
Pevo (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,331 edits
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|style="background:LightGrey; color:black"|Stage
|style="background:LightGrey; color:black"|Stage
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*X, Y: 125 × 100 mm
*X, Y: 125 × 100 mm
*T: 0 to 90o
*T: 0 to 90<sup>o</sup>
*R: 360o
*R: 360<sup>o</sup>
*Z: 48 mm
*Z: 48 mm
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|style="background:LightGrey; color:black"|Operating pressures
|style="background:LightGrey; color:black"|Operating pressures
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|style="background:WhiteSmoke; color:black"|
*Fixed at High vacuum (2 × 10-5mbar - 10-6mbar)
*Fixed at High vacuum (2 &times; 10<sup>-5</sup>mbar - 10<sup>-6</sup>mbar)
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|style="background:LightGrey; color:black"|Options
|style="background:LightGrey; color:black"|Options
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