Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions
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*Spin coating | *Spin coating | ||
*Soft baking | *Soft baking | ||
'''Features of Spin Coater: Gamma UV | '''Features of Spin Coater: Gamma UV''' | ||
*Cassette-to-cassette wafer handling | *Cassette-to-cassette wafer handling | ||
*In-line HMDS priming | *In-line HMDS priming | ||