Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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 **AZ nLOF resist
 |style="background:WhiteSmoke; color:black"|
-*Coating of all resist
+*Coating of
-*Coating of ESPACER
+** CSAR
+** ZEP
+** PMMA/MMA
+** HSQ (FOx)
+**AZ 5214E resist
+**AZ 4562 resist
+**AZ MiR resist
+**AZ nLOF resist
+** ESPACER
 |style="background:WhiteSmoke; color:black"|
 *Spraying imprint resist