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| ==Spin Coater: Manual All Resists ==
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| [[Image:Spin coater Manual Labspin in A-5.jpg|300x300px|thumb|Spin coater: Manual Labspin positioned in A-5]]
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| '''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#Spin_coater:_Manual_labspin click here]'''
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| ''[[Specific_Process_Knowledge/Lithography/Coaters#Coaters:_Comparison_Table|Coater comparison table]]''
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| The Spin coater: Manual Labspin is a SÜSS Labspin6 coater intended for processing of III-V compound semiconductors and CMOS compatible materals. The spinner is mounted in a flow hood located in the A-5 room (yellow room). The extra exhaust should always be turned on while spinning.
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| Please note, that there are different spinnings bowls for different resist, the first step before processing is choosing the proper bowl to use.
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| '''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 LabManager]'''
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| ===Process information===
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| '''Positive tone resists:'''
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| '''AZ 5214E'''
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| Spinning curve for[[media:AZ5214E_spin_curve.pdf| AZ5214E]].
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| Process parameters making the recipe:
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| '''Spinning'''
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| speed: xxxprm
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| acceleration: 1000rpm/s
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| time: 60s
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| '''Baking'''
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| 60sec on 90C hot plate
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| '''ZEP520A'''
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| Spinning curve for[[media:Spin_curve_ZEP520A.pdf| ZEP520A]].
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| Process parameters making the recipe:
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| '''Spinning'''
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| speed: xxxprm
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| acceleration: 1000rpm/s
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| time: 60s
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| '''Baking'''
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| 120sec on 180C hot plate
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| '''Negative tone resists'''
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| ''' AZ nLoF 2020'''
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| Spinning curve for[[media:Spin_curve_nLoF2020.pdf| AZ nLoF 2020]].
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| Process parameters making the recipe:
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| '''Spinning'''
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| speed: xxxprm
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| acceleration: 1000rpm/s
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| time: 30s
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| '''Baking'''
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| 60sec on 110C hot plate
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| ''' HSQ: FOX-15'''
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| Spinning curve for[[media:Spin_curve_Fox-15.pdf| FOX-15]].
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| Process parameters making the recipe:
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| '''Prebaking'''
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| 300sec on 220C hot plate
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| '''Spinning'''
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| speed: xxxprm
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| acceleration: 4000rpm/s
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| time: 60s
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| '''Baking'''
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| 120sec on 120C hot plate
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| 120sec on 220C hot plate. (Spinning curve made by Alexandra Lupi <allu@fotonik.dtu.dk>)
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| == Manual Spin Coaters == | | == Manual Spin Coaters == |
