Specific Process Knowledge/Thin film deposition/Deposition of Aluminium Nitride: Difference between revisions
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*Reactive Sputtering ( 6" Al target) or AlN target sputtering | *Reactive Sputtering ( 6" Al target) or AlN target sputtering | ||
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*Reactive Sputtering | *Reactive Sputtering ( 2" Al target) | ||
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