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Specific Process Knowledge/Back-end processing/Disco Saw: Difference between revisions

Hvj (talk | contribs)
Hvj (talk | contribs)
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|20 Å to ~2µm (for silicon oxide)
|20 Å to ~2µm (for silicon oxide)
|-valign="top"
|-valign="top"
|'''Film thickness accuracy'''
|'''Recommended dice depyh'''
|Very dependent of how good the model fits (if the fit is good it could be within 1% for a single layer)
|Very dependent of how good the model fits (if the fit is good it could be within 1% for a single layer)
|Very dependent of how good the model fits.
|Very dependent of how good the model fits.