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Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,527 edits
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''Sequence names, process parameters, and test results (Sequence no. 4000-4999):''
''Sequence names, process parameters, and test results (Sequence no. 4000-4999):''
*'''(4400) DCH 100mm 4562 6.2um'''
*'''(4462) DCH 100mm 4562 6.2um'''
*'''(4600) DCH 150mm 4562 6.2um'''
*'''(4662) DCH 150mm 4562 6.2um'''
Spin-off: 5165 rpm. Soft bake: 100s.
Spin-off: 5165 rpm. Soft bake: 100s.


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