Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
| Line 277: | Line 277: | ||
|Positive | |Positive | ||
| [http://www.allresist.com AllResist] | | [http://www.allresist.com AllResist] | ||
|We have various types of PMMA in the cleanroom | |We have various types of PMMA in the cleanroom. Please contact [mailto:Lithography@danchip.dtu.dk Lithography] for information. | ||
| | | | ||
|See table <u>[[Specific_Process_Knowledge/Lithography/Coaters#Coaters:_Comparison_Table|here]] </u> | |See table <u>[[Specific_Process_Knowledge/Lithography/Coaters#Coaters:_Comparison_Table|here]] </u> | ||